发明名称 PREALIGNMENT APPARATUS FOR SPECIMEN TREATMENT
摘要 <p>PURPOSE:To obtain an apparatus which can hold down a cost per unit area occupied by this apparatus and which can advance a process without waste and with high efficiency by executing several operations in parallel by a method wherein an end edge of a specimen is caught in a treatment part, the specimen is turned on its axis in its caught position and a reference side of the specimen is brought into contact with a reference face. CONSTITUTION:The following are arranged respectively on a base stand: a guide rail 13 which is composed of a thin piece and which supports one side of a specimen W, provided with a reference side OF on its outer periphery, along a route used to convey the specimen W to a treatment part; a guide belt 14 which conveys the specimen W by moving it along a conveyance route while the other side of the specimen W is being supported. A pin 21 with which an end edge of the specimen is caught in the treatment part, which turns the specimen W on its own axis in a caught position P and which brings the reference side OF into contact with a reference face 25 near the guide rail 13 can appear and dis appear from the conveyance route. In addition, the following are provided: for example, a size adjustment mechanism 19 which expands and reduces an interval between the guide rail 13 and the guide belt 14 by using the center of the specimen in the treatment part as a reference; and an interlocking mechanism 22 which changes a position of the pin 21 caught at the end edge of the specimen in order to stop the specimen W in a fixed position by working in conjunction with the adjustment mechanism 19.</p>
申请公布号 JPH02188940(A) 申请公布日期 1990.07.25
申请号 JP19890008875 申请日期 1989.01.17
申请人 SOKUEISHIYA KK 发明人 YOKOYAMA YASUAKI
分类号 H01L21/68 主分类号 H01L21/68
代理机构 代理人
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