MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19890010509-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH02189921(A)	申请公布日期	1990.07.25
申请号	JP19890010509	申请日期	1989.01.18
申请人	NEC CORP	发明人	NAKAMURA HIROYUKI
分类号	H01L23/522;H01L21/28;H01L21/318;H01L21/768	主分类号	H01L23/522
代理机构		代理人
主权项
地址

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