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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02189952(A)
申请公布日期
1990.07.25
申请号
JP19890009030
申请日期
1989.01.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUDA KAKUTAROU;OSAKI SABURO;NAKAMURA HIROSHI
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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