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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPH02188492(A)
申请公布日期
1990.07.24
申请号
JP19890006168
申请日期
1989.01.12
申请人
NEC CORP
发明人
KUBOTA HIROYA;UMEGAKI JUNICHI
分类号
C30B25/12;H01L21/205
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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