发明名称 Transducer
摘要 In a transducer, e.g. a pressure transducer, the sensing element comprises a torsional oscillator provided with magnetic means for feedback of signals to maintain oscillation. Typically the sensing element is formed by selective etching from a body of single crystal silicon.
申请公布号 US4942766(A) 申请公布日期 1990.07.24
申请号 US19880266818 申请日期 1988.11.03
申请人 STC PLC 发明人 GREENWOOD, JOHN C.;NADEN, JAMES M.
分类号 G01D5/30;G01K11/26;G01L9/00 主分类号 G01D5/30
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