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发明名称
Plasma reactor apparatus and method for treating a substrate
摘要
申请公布号
US4943345(A)
申请公布日期
1990.07.24
申请号
US19890328017
申请日期
1989.03.23
申请人
BOARD OF TRUSTEES OPERATING MICHIGAN STATE UNIVERSITY
发明人
ASMUSSEN, JES;REINHARD, DONNIE K.
分类号
B01J19/08;C23C16/27;C23C16/452;C23C16/50;C23C16/505;C23C16/511;C23C16/52;H01J37/32
主分类号
B01J19/08
代理机构
代理人
主权项
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