Process for making a multilayer metallization structure,申请号US19890350665-传众专利搜索

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发明名称	Process for making a multilayer metallization structure
摘要
申请公布号	US4943539(A)	申请公布日期	1990.07.24
申请号	US19890350665	申请日期	1989.05.09
申请人	MOTOROLA, INC.	发明人	WILSON, SYD R.;SELLERS, JAMES A.;MATTOX, ROBERT J.
分类号	H01L21/3205;H01L21/768;H01L23/522	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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