发明名称 LASER BEAM SHAPING APPARATUS
摘要 PURPOSE:To obtain uniform emitting laser beam without receiving the influence of condition at incident side by dividing the incident laser beam into small sections with cross section crossing at the right angle to beam axis and corresponding to the small sections divided at emitting side at random. CONSTITUTION:Rectangular opening parts 3, 4 of an incident side dividing means 1 crossing at the right angle to the beam axis of the incident laser beam 101 and emitting side integrated means 2 at the part thereof are divided into the rectangular small sections 3a, 4a, respectively. The incident side small sections 3a and the emitting side small sections 4a are optically connected with a corresponding means 5 composing of optical fiber, etc., corresponding to both sections mutually at random. The incident laser beam 101 is made incident on the incident side small sections 3a divided into plural sections and passed through the corresponding means 5 and guided into the emitting side small sections 4a at random, and as this is made to the emitting laser beam the unequality of shape and intensity in the incident laser beam 101 is made to smoothness, and the emitting laser beam is made to have uniform distribution.
申请公布号 JPH02187294(A) 申请公布日期 1990.07.23
申请号 JP19890004902 申请日期 1989.01.13
申请人 NEC CORP 发明人 KAJIKAWA TOSHIKAZU
分类号 B23K26/06;B23K26/073;H01L21/26;H01L21/268;H01L21/302;H01S3/101 主分类号 B23K26/06
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