| 摘要 |
PURPOSE:To easily calibrate EDX for measuring light elements by using a sample to be calibrated which contains at least boron and nitrogen and is formed with a carbon layer on the surface. CONSTITUTION:The characteristic X-ray of the element contained in an irradiated point L is radiated from the surface of the sample S when the surface of the sample S is irradiated with an electron ray or X-ray from above. This characteristic X-ray is made incident to the EDX and the element which is the source thereof is detected. Namely, the radiated characteristic X-ray is passes through the protective film M of the EDX and is made incident to a detecting element K made of silicon diffused with, for example, lithium, by which the X-ray is screened in energy and the element is detected. Sialon deposited with carbon by evaporation on the surface is used as the sample to be calibrated to calibrate the detected characteristic of the above-mentioned EDX, when the Sialon has long-term stability and, therefore, the result preferable in terms of the quality control and maintenance of the EDX for the light elements are obtd.
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