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发明名称
OPTICAL INSPECTING DEVICE
摘要
申请公布号
JPH02186247(A)
申请公布日期
1990.07.20
申请号
JP19890005341
申请日期
1989.01.12
申请人
KYUSHU ELECTRIC POWER CO INC;HITACHI CONSTR MACH CO LTD
发明人
HASUO YASUNORI;KANETANI AKIHIRO;SHOJI HIROAKI;HASHIMOTO AKIRA
分类号
G01N29/04;G01N21/84;G01N21/88;G01N21/93;G01N21/954
主分类号
G01N29/04
代理机构
代理人
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