| 摘要 |
PURPOSE:To obtain a low thermal expansion alloy excellent in brazeability to low thermal expansion ceramic material, such as aluminum nitride and mullite, used as package material for semiconductor equipment by alloying specific amounts of Ni and Co with Fe. CONSTITUTION:This alloy is an Fe-Ni-Co alloy having a composition consisting of, by weight, 30-40% (not including 30%) Ni, Co in an amount satisfying 40%<=Ni+Co<=45% in the relation with Ni content, and the balance Fe. Moreover, this alloy is a low thermal expansion alloy excellent in brazeability in which average thermal expansion coefficient at 30-400 deg.C and the initial temp. of martensitic transformation (Ms point) are regulated to (4:0 to 4.5)X10<-6>/ deg.C and <=-55 deg.C, respectively, and which enables superior brazing when used for brazing aluminum nitride and mullite as package material for semiconductor equipment because of its coefficient of thermal expansion close to those of aluminum nitride and mullite mentioned above and is, further, difficult to cause martensitic transformation by a thermal cycle test. |
