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发明名称
VERFAHREN ZUM REAKTIVEN IONENAETZEN VON MOLYBDAEN UND MOLYBDAENSILICID.
摘要
申请公布号
DE3482525(D1)
申请公布日期
1990.07.19
申请号
DE19843482525
申请日期
1984.03.06
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
WATANABE, TOHRU PATENT DIVISION, SAIWAI-KU KAWASAKI-SHI KANAGAWA-KEN, JP
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/31
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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