MANUFACTURE OF SEMICONDUCTOR DEVICE,申请号JP19890005429-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH02185029(A)	申请公布日期	1990.07.19
申请号	JP19890005429	申请日期	1989.01.12
申请人	TOSHIBA CORP	发明人	KATADA TOMIO;SUGURO KYOICHI
分类号	H01L21/285;H01L21/28	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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