SELECTIVE FORMING METHOD OF AL THIN-FILM,申请号JP19890005177-传众专利搜索

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发明名称	SELECTIVE FORMING METHOD OF AL THIN-FILM
摘要
申请公布号	JPH02185026(A)	申请公布日期	1990.07.19
申请号	JP19890005177	申请日期	1989.01.11
申请人	NEC CORP	发明人	NIIZAWA TSUTOMU
分类号	C23C16/18;H01L21/285;H01L21/3205;H01L23/52	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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