Sintered target member and method of producing same

摘要

A sintered target member consisting essentially of 50-75 weight % of Co, 3-12 weight % of Cr and balance substantially Ni, which has a structure comprising dispersion phases consisting essentially of one or more elements constituting the target member and having a maximum permeability of 50 or less. This target member is produced by mixing metal or alloy powders corresponding to low-permeability dispersion phases, charging the resulting mixture into a metal container; sealing the metal container under reduced pressure; sintering it at a temperature of 900 DEG -1300 DEG C. and pressure of 500 atm or more; and removing the metal container from the resulting sintered body.