| 摘要 |
PURPOSE:To achieve a uniformity in a collection efficiency of secondary ions obtained from a secondary area by combining a mechanical scanning in which a sample is moved in a direction of poor uniformity in a secondary ion collection efficiency with an electric scanning by a primary ion beam. CONSTITUTION:A primary ion beam 2 generated and accelerated by an ion source 1 impacts on a sample 5 through a lens system 3 and a deflector 4, a secondary ion 7 released from the sample 5 converges on an object slit 9 with a leader electrode 6 and a lens 8 and further, introduced to a mass spectrograph 10 to perform a mass spectrometry. A deflection control signal 13 and a sample movement control signal 14 are applied to the deflector 4 and a sample finely moving device 11 from a deflector scanner 12. In this manner, the sample is scanned by a primary beam in a first direction and moved in a second direction in substance at the right angle to the first direction, thereby enabling a uniformity in collection efficiency entirely in a secondary area where a secondary ion is generated. |
