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发明名称
LASER ANNEAL METHOD
摘要
申请公布号
JPH02181419(A)
申请公布日期
1990.07.16
申请号
JP19890000345
申请日期
1989.01.06
申请人
HITACHI LTD
发明人
KOIKE YOSHIHIKO;KO NAKAYUKI;AOYAMA TAKASHI;OKAJIMA YOSHIAKI
分类号
H01L21/20;H01L21/268;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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