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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH02181520(A)
申请公布日期
1990.07.16
申请号
JP19890000428
申请日期
1989.01.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
TERADA TAKAMORI
分类号
H01L27/04;H01L21/822;H03M1/12
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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