Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls

摘要

The unit has an enclosure formed from a stack of hexagonal blocks (5) separated by transverse walls (6) pierced by a central hole (7). Turbo-molecular pumps (10) are lodged in lateral holes in each face of the blocks, forming differential pressure regions between transverse walls. The pumps draw from the external part of the beam while conserving its internal density. The pumps are fully integrated into the enclosure with their pumping face close to the beam axis, and have no intermediate conduit. ADVANTAGE - Improved efficiency and beam quality in molecular pump due to optimum lateral pressure gradient.