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发明名称
VERFAHREN ZUM EINEBNEN DER OBERFLAECHE EINER HALBLEITERVORRICHTUNG, DIE SILIZIUMNITRID ALS ISOLIERENDES MATERIAL VERWENDET.
摘要
申请公布号
DE3671812(D1)
申请公布日期
1990.07.12
申请号
DE19863671812
申请日期
1986.09.17
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN, EINDHOVEN, NL
发明人
FABIEN, RAYMOND;DECROUEN, JEAN-MICHEL, F-75007 PARIS, FR
分类号
H01L21/302;H01L21/3065;H01L21/3105;H01L21/311;(IPC1-7):H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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