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发明名称
APPARATUS FOR DETECTING MOISTURE ABSORPTION DEFECT IN RESIN SEALED TYPE STRUCTURE
摘要
申请公布号
JPH02179485(A)
申请公布日期
1990.07.12
申请号
JP19880334606
申请日期
1988.12.28
申请人
YAMAZAKI SEIKI KENKYUSHO:KK
发明人
YAMAZAKI SHOHACHIRO
分类号
G01R31/26;H01L21/56
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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