摘要 |
The beam path (17) in a microscope with a Köhler-type illuminating device is at least approximately infinite. An optical transmission grid (12) is arranged in the infinite beam path (17) downstream of an optical slit (6) located in the plane (LF) of the condenser diaphragm. The zero- or first-order diffracted images formed are reproduced simultaneously or consecutively as desired on a sensor (13). Evaluation devices connected to the sensor (13) determine the spectral and densitometric distribution of a preselected object (10a). It is therefore possible to determine, for example, the width and height of an object simultaneously, from its densitometric and spectral distributions, respectively. |