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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02177476(A)
申请公布日期
1990.07.10
申请号
JP19880329218
申请日期
1988.12.28
申请人
HITACHI LTD
发明人
MORIKAWA MASATOSHI;YOSHIDA ISAO;OTAKA SHIGEO
分类号
H01L29/73;H01L21/331;H01L21/8222;H01L27/04;H01L27/06;H01L27/08;H01L29/732;H01L29/78
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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