TRANSFER APPARATUS OF CHARGED PARTICLE BEAM APPARATUS,申请号JP19890039619-传众专利搜索

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发明名称	TRANSFER APPARATUS OF CHARGED PARTICLE BEAM APPARATUS
摘要
申请公布号	JPH02177242(A)	申请公布日期	1990.07.10
申请号	JP19890039619	申请日期	1989.02.20
申请人	JEOL LTD	发明人	KAMIMURA EISUKE
分类号	H01J37/20	主分类号	H01J37/20
代理机构		代理人
主权项
地址

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