发明名称 HIGH-QUALITY PELLICLE
摘要 PURPOSE:To suppress dust production by forming an adhesive layer so that foreign matter is hardly observed at a inspection position and its periphery under the condition of microscope inspection after liquid is dripped on the interface with an optical thin film body and dried. CONSTITUTION:The adhesive layer 3 is formed of such an adhesive that fine foreign matter is hardly viewed at the inspection position and its periphery under the condition of the microscope inspection after the liquid is dripped on the interface with the optical thin film body 1 and dried. This adhesive sets preferably almost at room temperatures or under condition that temperatures for ultraviolet-ray irradiation and oxygen shielding need not be maintained, and urethan acrylate is usable as the best adhesive. Consequently, the production of fine foreign matter in transportation and use can be suppressed.
申请公布号 JPH02176659(A) 申请公布日期 1990.07.09
申请号 JP19880329246 申请日期 1988.12.28
申请人 ASAHI KASEI DENSHI KK 发明人 ASAI HISAO;MATSUI TAKEKI
分类号 G03F1/62 主分类号 G03F1/62
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