| 摘要 |
PURPOSE:To obtain easily a gas angle detector having a stable output characteristic and high sensitivity by a method wherein the opposite end parts of a gold- plated heat wire of a flow sensor are fitted to support elements by gold bonding and a laser light is applied to the heat wire in a part wherefrom the plated gold is removed by etching, so that the wire is subjected to annealing. CONSTITUTION:The main body 4 of a gas-type angular velocity sensor, which is constructed of a holder element 5, a head element 5 and a tubular body element 7, is accommodated in a casing 1 of the sensor, and a gas is sent out room a discharge port 10 into a flow channel 3 by a pumping action of a piezo plate 8 provided in a pump chamber 8 inside the holder element 5. The opposite end parts of gold-plated heat wires 21a and 21b of a flow sensor 14 provided in the fore end of a sensor chamber 13 of this sensor are fixed to gold-plated supports 20 by gold bonding. A laser light is applied to the wires 21a and 21b stretched between these supports respectively, so that the wires 21a and 21b be annealed by laser heating. Thereby the quantities of heat radiation of the wires 21a and 21b are made equal and an excellent detection characteristic is obtained. |
