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发明名称
DENJIHOSHAKENSHUTSUSOCHI
摘要
申请公布号
JPH0230446(B2)
申请公布日期
1990.07.06
申请号
JP19820111855
申请日期
1982.06.30
申请人
HONEYWELL INC
发明人
MAAKU ENU GAANII
分类号
G01J5/06;G01J1/02;H01L27/144;H01L31/0216
主分类号
G01J5/06
代理机构
代理人
主权项
地址
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