| 摘要 |
PURPOSE:To detect abnormality of not only a laser beam oscillator but also an optical fiber, etc., by detecting a leakage beam from a reflection mirror on an optical axis of a laser beam emitted from the optical fiber by a photoelectric conversion element to decide the propriety of the quantity of light. CONSTITUTION:The laser beam 26 emitted from the laser beam oscillator 24 is reflected by a half mirror 27 and a total reflection mirror 28. The laser beam 26 reflected by the mirror 27 is condensed by a lens 29 and passed through the optical fiber 31. The laser beam 33 of an outlet is condensed by a lens 35 and reflected by a mirror 37 and condensed on material 41 to be machined by a lens 39 to perform machining. The small quantity of laser beam 33 transmitted through the mirror 37 is dimmed out through a filter 47 and condensed by a lens 43 and photoelectric conversion is carried out by the element 45 and taken out as an electrical signal to detect whether or not it is normal. The laser beam 26 of the mirror 28 is detected in the same way. The abnormality of not only the laser beam oscillator but also the optical fiber, etc., is detected and the occurrence of defective machining is reduced. |
