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发明名称	SUSCEPTOR
摘要
申请公布号	JPH02174114(A)	申请公布日期	1990.07.05
申请号	JP19880326231	申请日期	1988.12.26
申请人	TOSHIBA CERAMICS CO LTD	发明人	SOTODANI EIICHI;ITO YUKIO;OHASHI TADASHI;SUMIYA MASAYUKI;SASAKI YASUSANE
分类号	C23C16/44;C23C16/458;H01L21/205;H01L21/31	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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