VERFAHREN UND SCHALTUNG ZUM AUTOMATISCHEN UND FORTLAUFENDEN SCHNELLADEN VON AUFLADBAREN BATTERIEN

摘要

Different focus voltages (VA1, VA2, VA3) are applied to respective electrodes (G3-G7) forming unipotential auxiliary lenses, in such a manner that they should have gradually diminishing potential differences in the electron travel direction. Focusings at the auxiliary lenses are attenuated, and therefore, the variations of the electric fields and the consequent variation of the characteristics of the beam spots due to the processing error of the electrodes are thereby lowered. <IMAGE>