SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF,申请号JP19880329656-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号	JPH02174230(A)	申请公布日期	1990.07.05
申请号	JP19880329656	申请日期	1988.12.27
申请人	SEIKO EPSON CORP	发明人	YUDASAKA KAZUO
分类号	C23C16/30;H01L21/316;H01L29/78;H01L29/786	主分类号	C23C16/30
代理机构		代理人
主权项
地址

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