| 摘要 |
PURPOSE:To monitor airtightness of a laser container based on an easy, rapid and secure automatic operation of a gas leakage rate thereof by operating the gas leakage rate in a state of exhaust during oscillation pause, by storing it to a memory with backup battery, and by informing the leakage rate before laser oscillation is started. CONSTITUTION:When an input command of operation conditions is input from a keyboard 16 at a time T1, a microcomputer 14 inputs a signal of a detected pressure P1 from a pressure detector 10, and stores it to a memory 15 with backup battery together with a present time T1. Then, for example, at a time T2 in the next morning, when an operation command is input from the keyboard 16, an operation part of the microcomputer 14 reads the present time T2 and a present pressure P2. At the same time, it reads data P1, T1 which are stored in the memory 15 and acquires a leakage rate by operation. A leakage rate rhoi thus obtained is displayed in a CRT 17, and if it is not less than an allowable value, an alarm signal is output. |
