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发明名称
SUSCEPTOR
摘要
申请公布号
JPH02174116(A)
申请公布日期
1990.07.05
申请号
JP19880326236
申请日期
1988.12.26
申请人
TOSHIBA CERAMICS CO LTD
发明人
NOZAWA TATSUO;MEGURO KAZUNORI;WATABE MASAYUKI
分类号
C23C16/44;C04B35/565;C23C16/458;H01L21/205;H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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