| 摘要 |
PURPOSE:To accurately and efficiently install a synchrotron radiation(SR) aligner in a desired position by a method wherein a leveling bolt is installed on a movable plate via a spherical rolling body and a positioning bolt used to push a side face of the movable plate via the spherical rolling body in a horizontal direction is installed. CONSTITUTION:The following are provided: a mask stage 3 which holds a mask 2 perpendicularly to an optical axis of an SR; a wafer stage 5 which positions a wafer 4 facing the mask 2; an apparatus base 6 on which the wafer stage 5 and the mask stage 3 have been loaded. In addition, the following are provided: four leveling bolts 7 which move the apparatus base 6, to which they have been screwed, perpendicularly to its installation face; movable plates 8 which have been attached to respective lower ends of the leveling bolts 7; installation members 9 which have been arranged at lower sides of the movable plates 8 and placed on an installation face 20. In addition, the following are installed: many spherical rolling bodies 10 arranged between the movable plates 8 and the installation members 9; a plurality of positioning bolts 11 which move the movable plates 8 in parallel with the installation face 20 and are screwed to the installation members 9. Thereby, it is possible to accurately install an SR aligner in a desired position. |
