| 摘要 |
PURPOSE:To work a film at high speed without spoiling the curved surface following accuracy by constantly holding the converged diameter of an energy beam corresponding to a change is facing distance between an energy beam converging means and the non-worked surface of the film. CONSTITUTION:X- and Y-axis beam scanning is performed by changing angles of beam reflecting mirrors 7 and 8. Adjustment of the beam condensing position in the Z-axis direction is performed by automatically moving one lens system 11 constituting a condenser lens together with another lens system 10 in the direction of the optical axis in accordance with the non-planar shape of a surface on which a film to be worked is placed so that an energy beam 6 can be condensed on the surface. Since the energy beam 6 can be condensed on the non-planar surface by only moving the extremely lightweight reflecting mirrors and lens system by small amounts, the film on the non-planar surface can be worked with high accuracy at a high speed. |
