| 摘要 |
PURPOSE:To detect the defects out of an entire check image and to discriminate the defects at a high speed by magnifying the comparison check result up to an allowable range of nondefective products and discriminating the overlap between an original picture and an edge picture. CONSTITUTION:The adjacent same patterns are compared with each other and a comparison result picture signal 1a is outputted via a comparison result picture part 1. A magnifier 3 magnifies the signal 1a and outputs a magnifying signal 3a. A setter 4 sets the number of magnified picture elements of the magnifier 3. An edge picture part 2 obtains a pattern edge and outputs an edge picture signal 2a. An AND device 5 obtains an AND between both signals 3a and 2a and outputs an AND signal 5a. then a detector 6 detects the pattern defects based on the picture information received from the part 1 and the signal 5a. In such a constitution, the defect discriminating speed is increased. |
