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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH02173260(A)
申请公布日期
1990.07.04
申请号
JP19880328739
申请日期
1988.12.26
申请人
FUJI PHOTO FILM CO LTD
发明人
NAKADA JUNJI;TAKEUCHI HIDEAKI
分类号
C23C14/34;G11B11/10;G11B11/105;H01F41/18
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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