发明名称 |
Electron beam apparatus with dynamic focussing. |
摘要 |
<p>Notably for transmission measurements, an electron microscope utilizes a dynamic focussing imaging optical system so that the focussing is optimally adjusted according to scanning lines even when measurements are performed on tilted objects. To this end, the object is preferably scanned in a pattern of lines extending parallel to an object tilt axis. Any defocussing of the electron beam, occurring at the irradiating side due to the dynamic focussing, can also be instantaneously corrected.</p> |
申请公布号 |
EP0376392(A1) |
申请公布日期 |
1990.07.04 |
申请号 |
EP19890203269 |
申请日期 |
1989.12.20 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
DE JONG, MARCUS JOHANNES CORNELIS |
分类号 |
H01J37/20;H01J37/21;H01J37/28 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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