发明名称 SEMICONDUCTOR MEMORY DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To prevent the incorrect reading of information stored in memory cells by visual inspection from above data lines by a method wherein the external appearances of the data line surfaces are made identical regardless of the existence of the contact. CONSTITUTION:The external appearances of the surfaces of data lines 11, 11' are made identical regardless of the existence of the contact. That is, a dummy hole 9 is formed at a necessary part, of an interlayer insulating film 14, which corresponds with a memory element Q1 being in noncontact with the data line 11, so that the surfaces of the data lines 11, 11' formed right above the dummy hole 9 and a contact hole 8 have almost the same appearances. Thereby, the incorrect reading of the data stored in memory cells Q1, Q2 visual inspection from above the data lines 11, 11' can be prevented.
申请公布号 JPH02172275(A) 申请公布日期 1990.07.03
申请号 JP19880325821 申请日期 1988.12.26
申请人 HITACHI LTD 发明人 DAIMON KAZUO
分类号 H01L27/112;H01L21/8246 主分类号 H01L27/112
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