| 摘要 |
<p>PURPOSE:To improve the humidity detection sensitivity and reduce the cost by a method wherein humidity-sensitive resistance elements made of predetermined contents of Bi2O3 and M2O3 and a heater which is made of heat-resistance metal and heats the humidity-sensitive resistance elements are provided. CONSTITUTION:Humidity-sensitive resistance elements 12 are made of 65-98mol% Bi2O3 and 2.0-35mol% M2O3, wherein M denotes at least one type of metal selected among pentavalent metals. A heater 14 is formed in the humidity- sensitive resistance elements 12. The heater 14 is made of heat-resistant metal and heats the humidity-sensitive resistance elements 12. A humidity sensor 10 composed like this can measure a humidity in a wide temperature range and the humidity-sensing characteristics are stable in course of time. Further, as the humidity-sensitive resistance elements 12 are heated by the heater 14 to a temperature at which they show good characteristics, the humidity detection sensitivity can be high and a humidity from a low humidity range to a high humidity range can be detected.</p> |
