| 摘要 |
A charged-particle beam device for irradiating a predetermined position on an object with a beam of charged particles, the device having an aperture member for restricting the beam of charged-particles from a source, the aperture member being divided into plural segments, and a detecting system for detecting any deviation of the axis of the beam of charged particles on the basis of electric currents produced, from the segments of the aperture member, by impingement of the beam of charged particles upon the segments of the aperture member.
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