PRODUCTION OF NONLINEAR RESISTANCE ELEMENT FOR LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE:To obtain the liquid crystal display device which is high in quality and low in cost at a high yield by providing a thin metallic film on intermediate conductor groups and anodizing the entire part of the thin metallic film to form a thin insulating film at the time of producing nonlinear resistance elements for the liquid crystal display device. CONSTITUTION:A Ta film is formed on a substrate and is subjected to dry etching to obtain the intermediate conductors 1. The thin Ta film is formed again thereon and the entire part of the thin Ta film of the upper layer is converted to the oxide film by an anodic oxidation treatment in an aq. citric acid soln. to form the thin insulating film 2 on the intermediate conductors 1. The thin aluminum film is patterned to form scanning electrodes 6 and finally thin ITO films to form electrodes 3, 4 at both ends of the nonlinear resistance elements is imparted and is then patterned. The electrodes 3 are formed simultaneously with picture element electrodes 5. The liquid crystal display device which has excellent symmetry and is high in quality and low in cost is obtd. at the high yield in this way.