| 摘要 |
The invention relates to an interferometric displacement measuring device in which the reference norm is a diffraction grid (G). Diffracted partial beam bundles (+m, -m) are fed into a coupler (TBJ) by means of coupling grids (+HG, -HG) via beam waveguides (+LWL, -LWL) and there brought into interference. The interfering partial beam bundles are transmitted from the outputs (+A, A, -A) via beam waveguides (+LWL, LWL, -LWL) to detectors (+D, D, -D) which convert them into electric signals out-of-phase with each other. The displacement of the diffraction grid (G) is a standard for measuring the changes in position of machine components which are movable relative to one another.
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