发明名称 |
Method of manufacturing semiconductor devices, involving the detection of water |
摘要 |
Disclosed is a method of semiconductor device fabrication involving the detection of water in a dielectric layer that is part of the body of such device. At relatively high values of a voltage applied across the dielectric layer, water that is present in the dielectric decomposes and releases protons. Varying the applied voltage gives rise to a displacement current. The released protons contribute an ionic component to the displacement current. The ionic component is detected.
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申请公布号 |
US4938847(A) |
申请公布日期 |
1990.07.03 |
申请号 |
US19890395929 |
申请日期 |
1989.08.18 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
ANDREWS, JR., JOHN M.;LIFSHITZ, NADIA;SMOLINSKY, GERALD |
分类号 |
G01N27/12;H01L21/3105 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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