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发明名称
BASE PLATE HOLDER
摘要
申请公布号
JPH02170977(A)
申请公布日期
1990.07.02
申请号
JP19880322964
申请日期
1988.12.21
申请人
ANELVA CORP
发明人
SUZUKI YASUHIRO
分类号
C23C14/50;C23C16/44;C23C16/458;C23C16/50;C23C16/511;C23F4/00
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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