发明名称 KOKUENRUTSUBO
摘要 PURPOSE:To provide a graphite crucible for melting aluminum enabled in enhancing the life thereof to a large extent, obtained by forming silicon carbide to the surface layer part of a graphite base material used as the material of said crucible. CONSTITUTION:A graphite base material to be used as the material of a graphite crucible is treated with silicon tetrachloride and toluene at about 1,200 deg.C in a steam stream to be coated with silicon carbide and the treated graphite material is subjected to heat treatment at about 1,900 deg.C or the above mentioned graphite base material is reacted with silicon monoxide generated from quartz and metal silicon at about 1,900 deg.C to convert the surface thereof to silicon carbide to obtain a graphite crucible having silicon carbide formed to the surface layer part thereof. By this method, silicon carbide stable to aluminum inhibits the reaction of graphite and aluminum to prolong the life of the graphite crucible for melting aluminum used in vapor deposition.
申请公布号 JPH0229745(B2) 申请公布日期 1990.07.02
申请号 JP19820151210 申请日期 1982.08.31
申请人 IBIDEN CO LTD 发明人 YASUDA SHIGEO;AOYAMA YOSHIJI
分类号 C23C14/24 主分类号 C23C14/24
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