| 摘要 |
PURPOSE:To provide an information recording medium having a high-sensitivity recording film capable of satisfactory optical recording even upon an increase in rotating frequency by providing a recording film which comprises a Cu-Te alloy, carbon and hydogen and which has specified composition ratios. CONSTITUTION:A recording film comprises a Cu-Te alloy, carbon and hydrogen, and has a structure in which Cu-Te alloy clusters are dispersed in a C-H matrix formed by chemical bonds of carbon and hydrogen. The recording film can be obtained by sputtering an alloy target by electric discharge in a stream of a mixed gas of a hydrocarbon gas and a rare gas in a vacuum vessel. The Cu content is preferably 2-50 atomic %. With Cu thus added, the size of pits becomes uniform, and the amount of rim parts is reduced, so that recording density is enhanced. The composition ratio, in atomic %, of carbon and hydrogen is preferably 25 atomic % <=C+H<=38 atomic %, whereas the composition ratio, in atomic %, of Cu and Te is preferably 62 atomic % <=Cu+Te<=75 atomic %. Since the recording film comprises the Cu-Te alloy, C and H, the recording film is hardly oxidized even when being left under hot and humid conditions. |
