,申请号JP19880164731U-传众专利搜索

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发明名称
摘要
申请公布号	JPH0284257(U)	申请公布日期	1990.06.29
申请号	JP19880164731U	申请日期	1988.12.19
申请人		发明人
分类号	C23C14/24;H01J37/08;H01J37/317;H01L21/265;(IPC1-7):H01J37/317	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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