发明名称 PROBE
摘要 PURPOSE:To make the measuring operation easy when two measuring points are needed for one object to be measured by providing a second measuring terminal coaxially with a first measuring terminal within the same holding member. CONSTITUTION:A needle-shaped measuring terminal 1 is provided centering a socket 3. A cylindrical measuring terminal 2 is provided coaxially with the terminal 1, specifically, at the outside of the terminal 1. Between the terminals 1, 2 and socket 3 are provided insulating bodies 4, 5 respectively. Moreover, the terminals 1, 2 are connected with measuring cables 6, 7 respectively. The socket 3 is secured to a probe hand 8. When the terminals 1 and 2 are in touch with an object to be measured (electrode) 11, they are pressed against the object 11 with a fixed pressure by springs 9, 10a and 10b. Therefore, the object 11 can be measured at two points. Moreover, it can be detected whether the probe is poorly connected to the substance 11 if a current is passed between the terminals 1 and 2.
申请公布号 JPH02168164(A) 申请公布日期 1990.06.28
申请号 JP19880324312 申请日期 1988.12.22
申请人 NEC CORP 发明人 HAMADA SHOICHI
分类号 G01R1/067;B23K26/00;G01R1/073;H01L21/66 主分类号 G01R1/067
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