| 摘要 |
PURPOSE:To provide a long-lived data recording medium even under circumstances at high temperature and humidity by forming a recording film of amorphous state which contains Cu, Te100-x(5<=x<=45 atomic %) alloy as well as carbon and hydrogen in a specific flow of a mixed hydrocarbon and rare gas atmosphere with the more amount of carbon in the part in contact with the substrate than that in the film, on the substrate. CONSTITUTION:A recording film 14 of amorphous state is provided on a substrate 13. This film contains an AuTe alloy in the flow X of a mixed hydrocarbon gas and rare gas atmosphere on a substrate and Cu, Te100-x(5<=x<=45 atomic %) alloy as well as carbon and hydrogen at less than 5<=Q<=50 % where Q={X/(X+Y)}X100%. The film also contains the more amount of carbon in the part in contact with the substrate than that of the film. If a film is formed at less than 5<=Q<=50 % (Q = flow rate), an optical absorption rate does not deteriorate due to the excessive amount of carbon C and hydrogen H. A recording film 14 reaches the minimum value of reflection factor due to a multiple interference effect, if the film is 1,000Angstrom thick. If the film is changed from an amorphous phase (dispersed state) to a crystal phase (flocculated state) at that thickness, the reflection factor becomes significant and data can be recorded accordingly. |
